JPS6314502B2 - - Google Patents

Info

Publication number
JPS6314502B2
JPS6314502B2 JP53104658A JP10465878A JPS6314502B2 JP S6314502 B2 JPS6314502 B2 JP S6314502B2 JP 53104658 A JP53104658 A JP 53104658A JP 10465878 A JP10465878 A JP 10465878A JP S6314502 B2 JPS6314502 B2 JP S6314502B2
Authority
JP
Japan
Prior art keywords
gate electrode
drain
source
region
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53104658A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5530873A (en
Inventor
Junji Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10465878A priority Critical patent/JPS5530873A/ja
Publication of JPS5530873A publication Critical patent/JPS5530873A/ja
Publication of JPS6314502B2 publication Critical patent/JPS6314502B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP10465878A 1978-08-28 1978-08-28 High withstand field-effect transistor of mis type Granted JPS5530873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10465878A JPS5530873A (en) 1978-08-28 1978-08-28 High withstand field-effect transistor of mis type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10465878A JPS5530873A (en) 1978-08-28 1978-08-28 High withstand field-effect transistor of mis type

Publications (2)

Publication Number Publication Date
JPS5530873A JPS5530873A (en) 1980-03-04
JPS6314502B2 true JPS6314502B2 (en]) 1988-03-31

Family

ID=14386555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10465878A Granted JPS5530873A (en) 1978-08-28 1978-08-28 High withstand field-effect transistor of mis type

Country Status (1)

Country Link
JP (1) JPS5530873A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58131773A (ja) * 1982-02-01 1983-08-05 Hitachi Ltd 半導体装置の製造方法
JP2881267B2 (ja) * 1991-01-11 1999-04-12 株式会社半導体エネルギー研究所 半導体装置およびその作製方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5272186A (en) * 1975-12-12 1977-06-16 Fujitsu Ltd Production of mis type semiconductor device
JPS5315773A (en) * 1976-07-28 1978-02-14 Hitachi Ltd Mis type semiconductor device and its production

Also Published As

Publication number Publication date
JPS5530873A (en) 1980-03-04

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